数据与计算发展前沿 ›› 2023, Vol. 5 ›› Issue (3): 29-38.

CSTR: 32002.14.jfdc.CN10-1649/TP.2023.03.003

doi: 10.11871/jfdc.issn.2096-742X.2023.03.003

• 专刊：“人工智能&大数据”科研范式变革专刊（下） • 上一篇    下一篇

薄膜生长数据自动化采集技术研究

王丹1,5(),周明波1,李云龙4,何露1,孙伟轩1,林泽丰1,李佳豪1,5,竺云5,陈其宏1,张宝花2,袁洁1,*(),翁红明1,3,*()   

  1. 1.中国科学院物理研究所，北京100190
    2.中国科学院计算机网络信息中心，北京 100083
    3.中国科学院凝聚态物质科学数据中心，北京 100190
    4.中国科学院前沿科学与教育局，北京 100864
    5.天津师范大学，天津 300387
  • 收稿日期:2023-05-04 出版日期:2023-06-20 发布日期:2023-06-21
  • 通讯作者: *袁洁（E-mail: yuanjie@iphy.ac.cn）；翁红明（E-mail: hmweng@iphy.ac.cn）
  • 作者简介:王丹，中国科学院物理研究所与天津师范大学物理与材料科学学院联合培养硕士研究生，主要研究方向为机器学习、数据库开发等。
    本文主要负责“实验仪器自动化采集技术”部分撰写，论文修改。
    WANG Dan is a joint graduate student of Institute of Physics, Chinese Academy of Sciences and School of Physics and Mate-rials Science, Tianjin Normal University. Her research interests include machine learning and database development.
    In this paper, she is mainly responsible for writing the part of “automatic acquisition technology of experimental inst-ruments” and revising the paper.
    E-mail: wangdan958@iphy.ac.cn|袁洁，中国科学院物理研究所，博士，主任工程师，近年来从事科研大数据规范化探索及相关仪器部件的研制。发表技术设备研发相关论文30余篇，Nature、Nature Physics、Nature Com-munications、PRL等科研论文50篇，其中受邀撰写科研和技术综述3篇。作为主要参与人的工作“基于电子实验记录本的科研数据平台”入选2022年度中国科学院网络安全和信息化十大工作进展。
    本文主要负责全文组织，“引言”撰写和论文修改。
    YUAN Jie, Ph.D., researcher of Institute of Physics, Chinese Academy of Sciences. In recent years, he has been engaged in the standardized exploration of scientific research big data and the development of related instrument components. He has published more than 30 papers on technical equipment research and development, and 50 scientific research papers on Nature, Nature Physics, Nature Communications, PRL, etc. Also, he was invited to write three review papers about scientific research and technology. His main participant’s work - “Scientific Research Data Platform Based on Electronic Lab Notebook” - was selected as one of the Top10 progress work in network security and informatization of the Chinese Academy of Sciences in 2022.
    In this paper, he is mainly responsible for organizing the full text, writing the “Introduction” and revising the paper.
    E-mail: yuanjie@iphy.ac.cn|翁红明，中国科学院物理研究所凝聚态理论与计算实验室，博士，研究员，兼任中国科学院凝聚态物质科学数据中心主任，主要研究方向为拓扑量子态及其材料计算研究、磁光效应、非线性光学效应等第一性原理计算。作为主要参与人的工作“基于电子实验记录本的科研数据平台”入选2022年度中国科学院网络安全和信息化十大工作进展。共发表SCI论文170余篇，被引用17000余次，h-因子54。入选2018、2019和2020年度科睿唯安”全球高被引科学家”。
    本文主要负责制定论文框架，内容组织。
    WENG Hongming, Ph.D., director of the Condensed Matter Physics Data Center, Chinese Academy of Sciences and Re-searcher at the Laboratory of Condensed Matter Theory and Computation, Chinese Academy of Sciences. His main resear-ch directions are topological quantum state and its material calculation research, magneto-optic effect, nonlinear optical effect, and other first-principle calculations. His main partic-ipant’s work - “Scientific Research Data Platform Based on Electronic Lab Notebook” - was selected as one of the Top 10 progress works in network security and informatization of the Chinese Academy of Sciences in 2022. He has published more than 170 SCI papers, which have been cited more than 17,000 times, with an h-factor of 54. He has been selected as “Global Highly Cited Researchers” by Clarivate Analytics in 2018, 2019, and 2020.
    In this paper, he is mainly responsible for developing the pap-er’s structure and organizing its content.
    E-mail: hmweng@iphy.ac.cn
  • 基金资助:
    中国科学院科学网信专项2022年度应用示范项目(CAS-WX2021SF-0102)

Research on Automated Data Acquisition Technology of Thin Film Growth

WANG Dan1,5(),ZHOU Mingbo1,LI Yunlong4,HE Lu1,SUN Weixuan1,LIN Zefeng1,LI Jiahao1,5,ZHU Yun5,CHEN Qihong1,ZHANG Baohua2,YUAN Jie1,*(),WENG Hongming1,3,*()   

  1. 1. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
    2. Computer Network information Center, Chinese Academy of Sciences, Beijing 100083, China
    3. Condensed Matter Physics Data Center, Chinese Academy of Sciences, Beijing 100190, China
    4. Bureau of Frontier Science and Education, Chinese Academy of Sciences, Beijing 100864, China
    5. Tianjin Normal University, Tianjin 300387, China
  • Received:2023-05-04 Online:2023-06-20 Published:2023-06-21

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摘要：

【目的】 本研究旨在通过自动化采集薄膜生长数据，从而提高薄膜数据采集的效率，大幅加快薄膜研究及工艺摸索。【应用背景】 随着薄膜技术的不断发展和应用，需要对薄膜生长过程进行深入的研究，以便更好地理解薄膜生长的机制。然而，目前的薄膜生长研究往往依赖于手动采集数据，存在效率低下和数据误差较大的问题。【方法】 为了解决这些问题，我们研发了电子实验记录本来规范数据采集，并通过自编采集程序实现了从薄膜合成和测试设备上对整个实验过程数据的全自动化采集方法。【结论】 该方法实现了对薄膜生长过程的高精度、高效率、无人工干预的实时监控和数据采集，为进一步研究薄膜生长机理和开发新型薄膜提供了实验基础和理论指导。

关键词: 薄膜生长, 数据采集, 电子实验记录本

Abstract:

[Objective]This research aims to improve the efficiency of film data acquisition by automatical collecting techniques, thereby greatly promoting the research on film growth. [Application back-ground] With the development and application of thin film technology, a deeper understanding of the film growth process is necessary to improve our ability to comprehend and manipulate film growth effectively. However, most of the current data collection processes rely on manual methods, which probably leads to low efficiency and data error. [Methods] In order to solve these problems, we developed electronic experimental notebooks to standardize the data collection and realized automated acquisition of the whole-process data from thin film synthesis and characterization. [Conclusions] The real-time monitoring and data acquisition of the film growth process with high precision, high efficiency, and no manual intervention is realized, which provides a more solid experimental basis and theoretical clues for further film research.

Key words: thin film growth, data collection, electronic experimental notebook