薄膜生长数据自动化采集技术研究
王丹, 周明波, 李云龙, 何露, 孙伟轩, 林泽丰, 李佳豪, 竺云, 陈其宏, 张宝花, 袁洁, 翁红明
Research on Automated Data Acquisition Technology of Thin Film Growth
WANG Dan, ZHOU Mingbo, LI Yunlong, HE Lu, SUN Weixuan, LIN Zefeng, LI Jiahao, ZHU Yun, CHEN Qihong, ZHANG Baohua, YUAN Jie, WENG Hongming
数据与计算发展前沿
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2023, (3): 29
-38
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DOI: 10.11871/jfdc.issn.2096-742X.2023.03.003
