Research on Automated Data Acquisition Technology of Thin Film Growth

doi:10.11871/jfdc.issn.2096-742X.2023.03.003

Frontiers of Data and Computing ›› 2023, Vol. 5 ›› Issue (3): 29-38.

CSTR: 32002.14.jfdc.CN10-1649/TP.2023.03.003

doi: 10.11871/jfdc.issn.2096-742X.2023.03.003

• Special Issue: AI for Science • Previous Articles Next Articles

Research on Automated Data Acquisition Technology of Thin Film Growth

WANG Dan^1,⁵(),ZHOU Mingbo¹,LI Yunlong⁴,HE Lu¹,SUN Weixuan¹,LIN Zefeng¹,LI Jiahao^1,⁵,ZHU Yun⁵,CHEN Qihong¹,ZHANG Baohua²,YUAN Jie^1,^*(),WENG Hongming^1,^3,^*()

1. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
2. Computer Network information Center, Chinese Academy of Sciences, Beijing 100083, China
3. Condensed Matter Physics Data Center, Chinese Academy of Sciences, Beijing 100190, China
4. Bureau of Frontier Science and Education, Chinese Academy of Sciences, Beijing 100864, China
5. Tianjin Normal University, Tianjin 300387, China

Received:2023-05-04 Online:2023-06-20 Published:2023-06-21

Abstract

Abstract:

[Objective]This research aims to improve the efficiency of film data acquisition by automatical collecting techniques, thereby greatly promoting the research on film growth. [Application back-ground] With the development and application of thin film technology, a deeper understanding of the film growth process is necessary to improve our ability to comprehend and manipulate film growth effectively. However, most of the current data collection processes rely on manual methods, which probably leads to low efficiency and data error. [Methods] In order to solve these problems, we developed electronic experimental notebooks to standardize the data collection and realized automated acquisition of the whole-process data from thin film synthesis and characterization. [Conclusions] The real-time monitoring and data acquisition of the film growth process with high precision, high efficiency, and no manual intervention is realized, which provides a more solid experimental basis and theoretical clues for further film research.

Key words: thin film growth, data collection, electronic experimental notebook

WANG Dan, ZHOU Mingbo, LI Yunlong, HE Lu, SUN Weixuan, LIN Zefeng, LI Jiahao, ZHU Yun, CHEN Qihong, ZHANG Baohua, YUAN Jie, WENG Hongming. Research on Automated Data Acquisition Technology of Thin Film Growth[J]. Frontiers of Data and Computing, 2023, 5(3): 29-38, https://cstr.cn/32002.14.jfdc.CN10-1649/TP.2023.03.003.

Figures/Tables 5

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References 16

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类型特点	纸质笔记本	电子表格	数据库	电子实验记录本
在线共享和协作	×	×	○	√
灵活性	√	×	×	√
可检索性	×	○	√	√
文件管理	×	×	○	√
可追溯性	×	×	√	√
数字签名	×	×	×	√
权限管理	×	×	×	√
文件管理	×	√	√	√
完整性	×	√	√	√
数据规范性	×	√	√	√
集成环境	×	×	×	√
数据汇交	×	○	○	√

Research on Automated Data Acquisition Technology of Thin Film Growth

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