Research on Automated Data Acquisition Technology of Thin Film Growth
WANG Dan, ZHOU Mingbo, LI Yunlong, HE Lu, SUN Weixuan, LIN Zefeng, LI Jiahao, ZHU Yun, CHEN Qihong, ZHANG Baohua, YUAN Jie, WENG Hongming
Frontiers of Data and Computing
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2023, (3): 29
-38
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DOI: 10.11871/jfdc.issn.2096-742X.2023.03.003
