集成电路先进制造技术进展与趋势
张睿,虞小鹏,程然,沈强,耿红艳,高大为,吴汉明
Recent Progresses on Advanced VLSI Manufacturing Techniques
ZHANG Rui,YU Xiaopeng,CHENG Ran,SHEN Qiang,GENG Hongyan,GAO Dawei,WU Hanming
数据与计算发展前沿
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2021, (5): 28
-39
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DOI: 10.11871/jfdc.issn.2096-742X.2021.05.002
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