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中文
Recent Progresses on Advanced VLSI Manufacturing Techniques
ZHANG Rui,YU Xiaopeng,CHENG Ran,SHEN Qiang,GENG Hongyan,GAO Dawei,WU Hanming
Frontiers of Data and Computing . 2021, (
5
): 28 -39 . DOI: 10.11871/jfdc.issn.2096-742X.2021.05.002
