TY - Frontiers of Data and Computing A1 - ZHANG Rui,YU Xiaopeng,CHENG Ran,SHEN Qiang,GENG Hongyan,GAO Dawei,WU Hanming T1 - Recent Progresses on Advanced VLSI Manufacturing Techniques Y1 - 2021-10-20 JF - Frontiers of Data and Domputing JO - Frontiers of Data and Computing SP - 28 EP - 39 VL - 3 IS - 5 UR - http://www.jfdc.cnic.cn N1 - 10.11871/jfdc.issn.2096-742X.2021.05.002 ER -